Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography
نویسندگان
چکیده
منابع مشابه
Microelectromechanical scanning probe instruments for array architectures
A compact (150 mm3150 mm), electrostatic actuator for out-of-plane (z) actuation of a probe tip has been designed, fabricated, and tested. Static deflections of 60.7 mm out of the plane of the substrate have been achieved. The device consists of a single crystal silicon tip on a torsional cantilever with out-of-plane interdigitated electrode capacitors. This cantilever and electrode design allo...
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In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and mult...
متن کاملStudying of various nanolithography methods by using Scanning Probe Microscope
The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...
متن کاملStudying of various nanolithography methods by using Scanning Probe Microscope
The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...
متن کاملHarnessing catalysis to enhance scanning probe nanolithography.
The use of scanning probes bearing catalysts to perform surface nanolithography combines the exquisite spatial precision of scanning probe microscopy with the synthetic capabilities of (bio)chemical catalysis. The ability to use these probes to direct a variety of localised chemical reactions enables the generation of nanoscale features with a high degree of chemical complexity in a "direct-wri...
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ژورنال
عنوان ژورنال: IEEE Transactions on Nanotechnology
سال: 2016
ISSN: 1536-125X,1941-0085
DOI: 10.1109/tnano.2016.2543606